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Title:
HEAT-RESISTANT RESIN VARNISH, HEAT-RESISTANT COATING AGENT CONTAINING HEAT-RESISTANT RESIN VARNISH, INSULATING FILM OR SEMICONDUCTOR APPARATUS USING HEAT-RESISTANT COATING AGENT
Document Type and Number:
Japanese Patent JP2007211204
Kind Code:
A
Abstract:

To obtain a heat-resistant resin varnish that improves wettability to various substrates by its use as an additive to various coating agents, has no reduction in compatibility with a coating agent and no reduction in heat resistance, does not cause sink mark, cissing and pinhole after coating or during drying and curing, coats a fixed part in high precision and plays a role of leveling agent, a heat-resistant coating agent containing the heat-resistant resin varnish and an insulating film using the heat-resistant coating agent and to provide a semiconductor apparatus.

The heat-resistant resin varnish comprises a resin having a siloxane backbone. The heat-resistant coating agent comprises the heat-resistant resin varnish. The insulating film uses the heat-resistant coating agent. The semiconductor apparatus uses a protective coat.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
MASUNO REIKO
KAWAKAMI HIROYUKI
Application Number:
JP2006035089A
Publication Date:
August 23, 2007
Filing Date:
February 13, 2006
Export Citation:
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Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
C09D183/04; C08G73/10; C08L79/08; C08L101/12; C09D5/25; C09D179/08; H01B3/30; H01L21/312
Domestic Patent References:
JPH09329707A1997-12-22
JP2006019654A2006-01-19
JPS61234051A1986-10-18
JPS59107523A1984-06-21
JPH02225521A1990-09-07