Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HEAT TREATING APPARATUS AND HEAT TREATING METHOD
Document Type and Number:
Japanese Patent JP2002110576
Kind Code:
A
Abstract:

To save energy for water cooling for cooling hot exhaust gas discharged during forced air cooling a heat treating apparatus and relax the water hammer phenomenon when the cooling water is stopped from flowing.

The heat treating apparatus comprises a heat exchanger for cooling hot exhaust gas with water and a closing means for stopping the cooling water from flowing in this order from the upstream of a water passage. The stopping means has an air-operated valve controlled by air pressure to open and close the valve. When a close instruction is sent from a controller to the closing means, compressed air from an air feed source is shut off to hold the air-operated valve open, and a speed controller controls the air escaping rate of the air-operated valve so as to gradually close the valve with taking a predetermined time of 0.5 sec or more.


Inventors:
YOSHIDA SEIICHI
Application Number:
JP2000296760A
Publication Date:
April 12, 2002
Filing Date:
September 28, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO ELECTRON LTD
International Classes:
F27D17/00; F27D9/00; F27D19/00; H01L21/22; (IPC1-7): H01L21/22; F27D9/00; F27D17/00; F27D19/00
Attorney, Agent or Firm:
Toshio Inoue