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Title:
HEAT TREATING APPARATUS
Document Type and Number:
Japanese Patent JP2002134428
Kind Code:
A
Abstract:

To provide a heat treating apparatus which maintains high heat insulation during processing and holds the heat radiation high during temperature falling after ending a process, thereby improving the temperature lowering characteristics.

The heat treating apparatus has a cylindrical process container 8 for removably housing a plurality of works W inside, a heating means 32 disposed around the process container, and a heat insulating means 34 disposed around the heating means. The insulating means 34 is composed of a plurality of rectangular strip-like heat insulating plates 34A, disposed to turnably cover the outside of the process container and a turning mechanism 40 for making the heat insulating plates turn, as required. This holds the heat insulation high during processing and holds the heat radiation high during temperature falling after ending a process, thereby improving the temperature lowering characteristics.


Inventors:
NAKAO MASARU
SAITO TAKANORI
OSANAI CHOEI
Application Number:
JP2000321758A
Publication Date:
May 10, 2002
Filing Date:
October 20, 2000
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F27B5/08; F27B5/18; F27D7/06; F27D9/00; H01L21/22; (IPC1-7): H01L21/22; F27B5/08; F27B5/18; F27D7/06; F27D9/00
Attorney, Agent or Firm:
Akihiro Asai