Title:
HEAT-TREATING DEVICE
Document Type and Number:
Japanese Patent JPH05299370
Kind Code:
A
Abstract:
PURPOSE: To make it possible to shut the opening in the lower end of a process tube immediately after a matter to be treated is carried in the vertical type heat-treating furnace.
CONSTITUTION: A gas introducing part 60 is provided in the upper end of a vertical type heat-treating furnace (a process tube) 12 provided with a planar heating source 18 arranged over the furnace 12 in such a way as to communicate with the furnace 12, a vertically movable suspension axis 38 is arranged along this part 60 and a support part 42 for a wafer 28 is secured on the point of the axis 38. A cap 118 for sealing an opening 12a in the lower end of the furnace 12 is vertically moved by a cap drive part 110.
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Inventors:
OKASE WATARU
Application Number:
JP13019392A
Publication Date:
November 12, 1993
Filing Date:
April 23, 1992
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/205; H01L21/22; H01L21/31; H01L21/324; (IPC1-7): H01L21/22; H01L21/205; H01L21/31; H01L21/324
Attorney, Agent or Firm:
Hajime Inoue (2 outside)