Title:
HEAT-TREATING EQUIPMENT
Document Type and Number:
Japanese Patent JP3543963
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve maintenance operability by simplifying the piping of an exhaustion system.
SOLUTION: The heat-treating equipment is provided with a main valve 18, a 1st auxiliary valve 30, and a 2nd auxiliary valve 31 for a pipe 13 of the exhaustion system 12 of a heat-treating furnace 1, Further, the equipment has two bypass passages 32 and 33 which link the side of an entrance 22 and the side of an exit 23 to each other are formed in a main body 21 which forms the exterior of the main valve 18, and the main body 21 of the main valve 18 is provided with the 1st auxiliary valve 30 which opens and closes one bypass passage 32 and the 2nd auxiliary valve 31 which opens and closes the other bypass passage 33.
Inventors:
Hiroyuki Matsuura
Satoru Koike
Satoru Koike
Application Number:
JP2001142881A
Publication Date:
July 21, 2004
Filing Date:
May 14, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27D19/00; C23C16/44; C23C16/52; F16K1/52; F16K51/02; F27B5/16; G05D16/16; H01L21/205; H01L21/22; H01L21/31; H01L21/324; (IPC1-7): H01L21/31; C23C16/44; F27B5/16; F27D19/00; H01L21/22
Domestic Patent References:
| JP2134372U | ||||
| JP6101782A | ||||
| JP63040664U | ||||
| JP4104318U | ||||
| JP2000106347A |
Attorney, Agent or Firm:
Noriyuki Kanasaka