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Patent Searching and Data


Title:
HEAT TREATMENT APPARATUS FOR SUBSTRATE
Document Type and Number:
Japanese Patent JP2003031517
Kind Code:
A
Abstract:

To provide an apparatus which can equalize the powers to be supplied to a plurality of lamps which constitute a light source for heating, and which can drive all the lamps near the rated output.

Between the lamps 28 and a light-incident window 14 of a heat treatment furnace 10, a group of lenses 44 which consists of a plurality of lenses 46 arranged two-dimensionally in parallel is interposed. Among the group of lenses, those disposed near the center are concave lenses, and a condensing degree of a plurality of lenses disposed around those near the center is made higher as gradually approaching toward the periphery.


Inventors:
ITO SADAAKI
Application Number:
JP2001219936A
Publication Date:
January 31, 2003
Filing Date:
July 19, 2001
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
F27B17/00; F27D11/02; H01L21/26; (IPC1-7): H01L21/26; F27B17/00; F27D11/02
Attorney, Agent or Firm:
Mamiya Takeo