Title:
HEAT-TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JPS5385774
Kind Code:
A
Abstract:
PURPOSE: To decrease the outside air entering a heat-treatment furnace pipe due to taking wafer in and out of the pipe by setting a purge pipe at the outlet of the heat-treatment furnace pipe, and by flowing in inert gas through the purge pipe to form a gas curtain.
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Inventors:
OOKURA ISAO
OOMORI MASASHI
HAMA MASAHARU
OOMORI MASASHI
HAMA MASAHARU
Application Number:
JP99577A
Publication Date:
July 28, 1978
Filing Date:
January 08, 1977
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
F27D7/06; F27D5/00; H01L21/22; (IPC1-7): F27D5/00; H01L21/22