Title:
ガラス基板用熱処理装置
Document Type and Number:
Japanese Patent JP5848057
Kind Code:
B2
Inventors:
Kazuya Masunaga
Takahiro Sugauchi
Takahiro Sugauchi
Application Number:
JP2011169857A
Publication Date:
January 27, 2016
Filing Date:
August 03, 2011
Export Citation:
Assignee:
Showa Iron Works Co., Ltd.
International Classes:
H05B3/06; F27D11/02; H05B3/20; H05B3/72
Domestic Patent References:
| JP2008102195A | ||||
| JP2006286222A | ||||
| JP2002184561A | ||||
| JP57133056U | ||||
| JP48108448U | ||||
| JP2002020803A | ||||
| JP2011043388A |
Attorney, Agent or Firm:
Kenichiro Matsuo
Yasuo Ichikawa
Yasuo Ichikawa