Title:
熱処理装置及びその方法
Document Type and Number:
Japanese Patent JP3625741
Kind Code:
B2
Inventors:
Ishii Victory
Kazutoshi Miura
Kazutoshi Miura
Application Number:
JP2000162769A
Publication Date:
March 02, 2005
Filing Date:
May 31, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/452; C23C16/455; F27B5/16; F27D7/02; F27D7/06; F27D21/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/31; C23C16/452; C23C16/455; F27B5/16; F27D7/02; F27D7/06; F27D21/00; H01L21/22
Domestic Patent References:
| JP7142460A | ||||
| JP5085890A | ||||
| JP5239652A | ||||
| JP7268634A | ||||
| JP9148315A |
Attorney, Agent or Firm:
Toshio Inoue