Title:
熱処理装置
Document Type and Number:
Japanese Patent JP5411470
Kind Code:
B2
More Like This:
JP2000048936 | SILICON CARBIDE HEATING ELEMENT |
WO/1991/012477 | HIGH TEMPERATURE DIFFUSION FURNACE |
Inventors:
Fujita Ono
Mukai Masayuki
Tadayoshi Nakamura
Mitsuki Nakagaki
Mukai Masayuki
Tadayoshi Nakamura
Mitsuki Nakagaki
Application Number:
JP2008223600A
Publication Date:
February 12, 2014
Filing Date:
September 01, 2008
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H05B3/64; F26B5/04; F26B23/06; F27D7/06; F27D11/02; H05B3/10; H05B3/48; F26B9/00
Domestic Patent References:
JP63058490U | ||||
JP2002110318A | ||||
JP2007220595A | ||||
JP4225788A | ||||
JP8020868A | ||||
JP2003142235A |
Attorney, Agent or Firm:
Kaede International Patent Office
Hisao Komori
Toshio Ozawa
Hisao Komori
Toshio Ozawa