Title:
熱処理装置
Document Type and Number:
Japanese Patent JP6378610
Kind Code:
B2
More Like This:
Inventors:
Makoto Kobayashi
Application Number:
JP2014218383A
Publication Date:
August 22, 2018
Filing Date:
October 27, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27D7/06; F16L59/00; F27B5/14; F27D11/02; H05B3/14
Domestic Patent References:
| JP7106262A | ||||
| JP2007142363A | ||||
| JP2003197552A | ||||
| JP54165344U | ||||
| JP2008262959A | ||||
| JP63144866A | ||||
| JP2012049380A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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