Title:
熱処理装置
Document Type and Number:
Japanese Patent JP7122856
Kind Code:
B2
Abstract:
A heat treatment apparatus includes: a processing container extended in a vertical direction; and a heater provided to surround the processing container. The heater includes: a first insulator of a cylindrical shape that has a ceiling surface and an opening at a lower end; a heat generator provided along a circumferential direction on an inner circumferential side of the first insulating member; and a second insulator arranged along the circumferential direction of the first insulating member at a position adjacent to the heat generating elements.
Inventors:
Tatsuya Yamaguchi
Yasuaki Kikuchi
Yasuaki Kikuchi
Application Number:
JP2018088819A
Publication Date:
August 22, 2022
Filing Date:
May 02, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H05B3/66; F27D11/02
Domestic Patent References:
| JP2002075890A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito