Title:
熱処理装置
Document Type and Number:
Japanese Patent JP7149377
Kind Code:
B2
Abstract:
To prevent leakage of an atmosphere gas from a thermal treatment tube in a thermal treatment apparatus comprising the thermal treatment tube and a cantilever loader.SOLUTION: In a thermal treatment apparatus, a cantilever loader 2 includes a cantilever part 3, a loader part, a door part 5 and a first seal mechanism 6. The cantilever part 3 is supported by the loader part and includes a distal end portion on which a workpiece is placed. The door part 5 closes an opening end portion of the thermal treatment tube when disposing the workpiece at a predetermined position. A through-hole 5a is provided in the door part 5, and the door part 5 is supported by the loader part in a state where the cantilever part 3 passes the through-hole 5a. The first seal mechanism 6 includes: a cover part 61 that covers an entire portion in the cantilever part 3 protruding outsides from the door part 5; a connection mechanism for connecting and fixing an end portion 61a of the cover part 61 to the door part 5; and a seal material 64 that is provided in the connection mechanism.SELECTED DRAWING: Figure 2
Inventors:
Atsushi Morimoto
Shinichi Ikeda
Masanori Kokubo
Shinichi Ikeda
Masanori Kokubo
Application Number:
JP2021095407A
Publication Date:
October 06, 2022
Filing Date:
June 07, 2021
Export Citation:
Assignee:
JTEKT Thermo System Co., Ltd.
International Classes:
H01L21/22; F27B17/00; F27D3/06; F27D7/06; H01L21/677
Domestic Patent References:
| JP51096363U | ||||
| JP4018298U | ||||
| JP58212146A | ||||
| JP60007122A | ||||
| JP2014052165A | ||||
| JP2012073234A |
Attorney, Agent or Firm:
Patent Attorney Kaede International Patent Office
Previous Patent: Geothermal heat utilization system
Next Patent: HEAT INSULATING CONTAINER AND METHOD FOR PRODUCTION THEREOF
Next Patent: HEAT INSULATING CONTAINER AND METHOD FOR PRODUCTION THEREOF