Title:
熱処理オーブンのヒーター電源供給装置
Document Type and Number:
Japanese Patent JP7072021
Kind Code:
B2
Abstract:
Disclosed is a heater power supply device for a heat treatment oven. The present invention may include: a heat treatment oven having a chamber for accommodating a substrate for drying by heating, and mounting a heater, which is a heating element, in the chamber to heat or dry the substrate with the heat of the heater; a conductive part to which a plurality of bus bars for passing current by connecting the heating wire of the heater are connected; and a power supply part having a plurality of feedthroughs protruding from the outer casing of the chamber to induce the connection of an external power input terminal along the inner and outer casings of the chamber and passing a current to the busbar. The heater power supply part of the heat treatment oven is separately formed in the outer casing of the chamber, thereby improving the management workability of the power supply part, including monitoring and maintenance of the power supply part.
Inventors:
Kim Minchul
Nakanishi Satoru
Nakanishi Satoru
Application Number:
JP2020118405A
Publication Date:
May 19, 2022
Filing Date:
July 09, 2020
Export Citation:
Assignee:
Coyo Thermo System Korea Company Limited
International Classes:
H05B3/02
Domestic Patent References:
| JP59176000U | ||||
| JP2000208236A | ||||
| JP61164023U | ||||
| JP62083200U |
Foreign References:
| KR102094763B1 |
Attorney, Agent or Firm:
Tomoharu Ashikita
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