Title:
HEAT TREATMENT SYSTEM
Document Type and Number:
Japanese Patent JP2002075889
Kind Code:
A
Abstract:
To provide a heat treatment system for reducing a variation in cooling of a heater, enlarging the setting width in temperature difference between inlet and outlet of a coolant path without an influence on temperature uniformity of a workpiece, and improving exhaust heat usage and efficiency of heat recovery.
The heat treatment system includes a treatment container 2 for storing a workpiece (W) and treating it by heat, a heater 10 around the treatment container 2, and a cooling unit 21 around the heater 10. The cooling unit 21 has at least two lines of coolant paths 23 and 24 for circulating the coolant mutually in reverse directions.
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Inventors:
KATO KAZUHIKO
YAMAGA KENICHI
YAMAGA KENICHI
Application Number:
JP2000265806A
Publication Date:
March 15, 2002
Filing Date:
September 01, 2000
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H05B3/00; F27B5/14; F27B5/18; H01L21/205; H01L21/22; (IPC1-7): H01L21/22; F27B5/14; F27B5/18; H01L21/205; H05B3/00
Attorney, Agent or Firm:
Noriyuki Kanasaka