Title:
ヒータベース及び処理装置
Document Type and Number:
Japanese Patent JP6793828
Kind Code:
B2
Abstract:
A heater base of the invention includes a plurality of displacement mechanisms that are arranged between the heater and the heater base and are provided on the heater base. Of the displacement mechanisms, three or more displacement mechanisms are capable of displacing the heater with respect to the heater base in a state of being in contact with the heater.
Inventors:
Takenao Miyatani
Yosuke Jimbo
Yoshiaki Yamamoto
Kenji Eto
Yoichi Abe
Yosuke Jimbo
Yoshiaki Yamamoto
Kenji Eto
Yoichi Abe
Application Number:
JP2019523141A
Publication Date:
December 02, 2020
Filing Date:
January 16, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/683; C23C14/50; C23C16/458; C23C16/46; H05B3/06
Domestic Patent References:
| JP2000021889A | ||||
| JP2008244079A |
Foreign References:
| WO2012147343A1 |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Tomoo Katsumata
Ryo Tsuchiya