Title:
HEATER COMPONENT
Document Type and Number:
Japanese Patent JPH1167427
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To manifest high durability in an oxidative atmosphere, etc., and improve uniformity of temperature by forming with sintered silicon carbide, wherein the density is specified and silicon carbide powder and a nonmetallic sintering auxiliary are uniformly mixed. SOLUTION: A disk-shaped molding is obtained by mixing beta-type silicon carbide and a phenol resin as a nonmetallic sintering auxiliary, filling the formed uniform silicon carbide powder material into a metal mold, and heating and pressuring it. The obtained molding is put in a graphite mold and hot pressed under a specific condition. The obtained sinter has a density of 2.9/cm<2> or above. The sinter is cut by an electrical discharge machine, and the cut surface is ground by a grinder to form a heater component. Thereby, a heater component is obtained, which can manifest high durability in oxidative, vacuum and corrosive conditions, has excellent uniformity of temperature, and hardly fouls.
Inventors:
TAKAHASHI KEICHI
WADA HIROAKI
SATO AKIRA
WADA HIROAKI
SATO AKIRA
Application Number:
JP23146897A
Publication Date:
March 09, 1999
Filing Date:
August 27, 1997
Export Citation:
Assignee:
BRIDGESTONE CORP
International Classes:
C04B35/575; C04B35/626; H01L21/205; H05B3/14; (IPC1-7): H05B3/14; C04B35/626
Attorney, Agent or Firm:
Atsushi Nakajima (4 people outside)