Title:
加熱装置
Document Type and Number:
Japanese Patent JP5338723
Kind Code:
B2
Abstract:
A heating apparatus contains a chamber that has a space for placing a work piece, a filament lamp that has an arc tube, and a sealing portion provided at an end of the arc tube. The heating apparatus further contains a glass tube extending through the chamber. A cooling fluid is introduced into the glass tube. An end of the glass tube extends to an outside of the chamber. A sealing member seals the glass tube and the chamber. The filament lamp is arranged inside the glass tube.
Inventors:
Shinji Taniguchi
Toru Otagaki
Toru Otagaki
Application Number:
JP2010058594A
Publication Date:
November 13, 2013
Filing Date:
March 16, 2010
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
C23C16/46; H01K7/00; H05B3/00; F24C7/04; F24C7/06
Domestic Patent References:
| JP2008028305A | ||||
| JP2010055763A | ||||
| JP2003114030A | ||||
| JP7130677A | ||||
| JP61131419A | ||||
| JP10321530A | ||||
| JP2005101228A |
Foreign References:
| WO2005083760A1 | ||||
| WO2007063838A1 |
Attorney, Agent or Firm:
Tsutomu Igarata