Title:
HEATING DEVICE
Document Type and Number:
Japanese Patent JPH01124726
Kind Code:
A
Abstract:
PURPOSE:To control heating temperature properly by measuring the emissivity of a body being heated and correcting the temperature measured value of the heated body by using the emissivity, and controlling the intensity of the heating of the heated body according to the corrected temperature value. CONSTITUTION:The emissivity measurement part consisting of a light source 11, a photodetection quantity measurement part 12, and an emissivity calculation part 13 finds the emissivity of a semiconductor substrate 1. A light source 11 irradiates the semiconductor substrate 1 with light having the same wavelength with an infrared ray measured by a radiation thermometer 5 and a photodetection quantity measurement part 12 measures the quantity of light reflected by the semiconductor substrate 1. An emissivity calculation part 13 finds a reflection factor which is the ratio of the quantity of the reflected light to the quantity of projected light and further finds the emissivity. Then a temperature measuring instrument 14 corrects the temperature of the semiconductor substrate 1 which is found from the infrared radiation intensity measured by the radiation thermometer 5 by using the emissivity found by the emissivity calculation part 13 and controls the intensity of the heating of the semiconductor substrate 1 according to the corrected temperature value.
Inventors:
MINAZU YASUMASA
Application Number:
JP28264387A
Publication Date:
May 17, 1989
Filing Date:
November 09, 1987
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L21/26; C23C14/54; G01J5/00; G01J5/10; H05B3/00; (IPC1-7): G01J5/10; H01L21/26; H05B3/00
Domestic Patent References:
| JPS6038627A | 1985-02-28 |
Attorney, Agent or Firm:
Kazuo Sato (2 outside)