Title:
HEATING FURNACE
Document Type and Number:
Japanese Patent JP3208047
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heating furnace which can heat and harden uniformly the paste applied on the surface of a base and can produce the base of high quality and of which the area of installation is small.
SOLUTION: A plurality of elevating pins 15 which pierce a hot plate 16 equipped with a heater 22 and are movable in the vertical direction are provided inside a furnace body 2 and a base 12 brought in from an opening part 9 of a partition 8 is loaded on the elevating pins 15 having risen. The elevating pins 15 lower the base 12 to the vicinity of the hot plate 16 and the base is preheated by the heated hot plate 16. Then, the elevating pins 15 lower further and the base 12 is vacuum-sucked on the hot plate 16 and heated thereby principally. Thereafter the elevating pins 15 rise and elevate the base 12 to the original position and a nitrogen gas is blown against the surface of the base 12 from a nozzle of a gas supply pipe 23 so as to facilitate cooling of the base 12. After the base 12 is cooled, it is brought out from the opening part 9.
Inventors:
Haruo Sankai
Kiyoshi Imaizumi
Shinya Yamama
Kiyoshi Imaizumi
Shinya Yamama
Application Number:
JP19049795A
Publication Date:
September 10, 2001
Filing Date:
July 26, 1995
Export Citation:
Assignee:
Hitachi Techno Engineering Co., Ltd.
International Classes:
F27D3/12; F27B5/06; F27B5/18; F27D7/06; H01L21/68; H01L21/683; H05K3/12; (IPC1-7): F27B5/06; F27B5/18; F27D3/12; F27D7/06; H01L21/68; H05K3/12
Domestic Patent References:
| JP697269A | ||||
| JP4238892A | ||||
| JP2216817A | ||||
| JP639165U | ||||
| JP149010B2 |
Attorney, Agent or Firm:
Kenjiro Take