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Title:
HEATING SYSTEM
Document Type and Number:
Japanese Patent JPH11101840
Kind Code:
A
Abstract:

To provide a heating system capable of heating a minute region without being restricted by diffraction limit of light, and improve resolution of a wiring inspection instrument inspecting a wiring layer by detecting resistance change while local heating is performed by using the heating system.

A convergent type sharp tip part 2 is formed at one end portion of an optical fiber 1. This heating system is constituted of an optical fiber probe 4 in which the tip part 2 is covered with a light absorbing film 3, and a laser light source 5 connected with the other end portion of the probe 4. A laser light L outputted from the laser light source 5 is introduced from the other end portion of the probe 4, and guided to the sharp tip part 2. The light absorbing film covering the sharp tip part 2 absorbs the light and generates heat. By making the light absorbing film 3 generating the heat approach a specimen to be heated or bringing the film 3 in contact with the specimen, heating is performed.


Inventors:
SAIKI TOSHIHARU
OTSU GENICHI
Application Number:
JP26214797A
Publication Date:
April 13, 1999
Filing Date:
September 26, 1997
Export Citation:
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Assignee:
KANAGAWA KAGAKU GIJUTSU AKAD
International Classes:
G01R31/02; G02B6/00; G02B6/02; G02B6/10; H01L21/268; H01L21/66; (IPC1-7): G01R31/02; G02B6/00; G02B6/10; H01L21/268; H01L21/66
Attorney, Agent or Firm:
Akira Koike (2 outside)