To provide a heating system capable of heating a minute region without being restricted by diffraction limit of light, and improve resolution of a wiring inspection instrument inspecting a wiring layer by detecting resistance change while local heating is performed by using the heating system.
A convergent type sharp tip part 2 is formed at one end portion of an optical fiber 1. This heating system is constituted of an optical fiber probe 4 in which the tip part 2 is covered with a light absorbing film 3, and a laser light source 5 connected with the other end portion of the probe 4. A laser light L outputted from the laser light source 5 is introduced from the other end portion of the probe 4, and guided to the sharp tip part 2. The light absorbing film covering the sharp tip part 2 absorbs the light and generates heat. By making the light absorbing film 3 generating the heat approach a specimen to be heated or bringing the film 3 in contact with the specimen, heating is performed.
OTSU GENICHI