Title:
HEATING UNIT FOR PROCESSING EQUIPMENT FOR EXHAUST GAS CONTAINING NOX OR NH3
Document Type and Number:
Japanese Patent JP3923001
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the size and energy consumption of the whole of processing equipment by reducing the size and making rapid heating-up possible in a heating unit used in the processing equipment for processing an exhaust gas containing NOx or NH3 which is exhausted during manufacturing processes of a semiconductor device.
SOLUTION: The heating unit is used for the exhaust gas processing equipment which exclusively deals with NOx or NH3 contained in the exhaust gas from the semiconductor manufacturing processes, and which comprises a pre-heating section for pre-heating the exhaust gas and/or dilution gas to be mixed into the exhaust gas; a mixing section 11 for mixing the pre-heated dilution gas and the exhaust gas; and a reaction section 15 for bringing the diluted exhaust gas into contact with a catalytic agent to eliminate NOx or NH3. In the heating unit 12, that is, the pre-heating section, a zigzag flow channel for the exhaust gas or the dilution gas is formed by a plurality of flat ceramic heaters arranged like alternate stairs or a heater unit 20 made by combining a plurality of ceramic heaters.
Inventors:
Hashikura Manabu
Hirohiko Nakata
Ryuji Hiramoto
Hirohiko Nakata
Ryuji Hiramoto
Application Number:
JP2002327707A
Publication Date:
May 30, 2007
Filing Date:
November 12, 2002
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
Tomoe Shokai Co., Ltd.
Tomoe Shokai Co., Ltd.
International Classes:
B01D51/00; H01L21/02; B01D53/86; B01D53/94; H01L21/22; (IPC1-7): H01L21/02; B01D51/00; B01D53/86; B01D53/94; H01L21/22
Domestic Patent References:
| JP9213596A | ||||
| JP2001087625A | ||||
| JP11333247A |
Attorney, Agent or Firm:
Masao Yamamoto
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