To enable input inspection of a test signal of high frequency in a wafer test by a high-frequency receiving device 21 which is used to receive a high-frequency signal and having circuit integration.
Provided are a test signal source 39 which generates the test signal of high frequency and a test signal supply circuit 23 which performs input switching. Consequently, the yield is improved and the need for an expensive test signal source is eliminated to lower the cost. Further, the incorporated test signal source 39 generates the test signal by using signals from a VCO 35 and an oscillator 36 needed to generate a local oscillation signal for frequency conversion, so while an increase in circuit scale is minimized, a test can be conducted in the integrated circuit.
Ryuichi Kijima
Ichiro Kaneko