To suppress a twisting action by a suspension to prevent a collision between electrodes.
This switch has a ground, a movable electrode, and a stationary conductor on the same surface. The ground also has a function serving as a fixed electrode and is provided with a fixed electrode that longitudinally extends. The movable electrode has: a fixed portion that is fixed on the same surface; a movable portion that longitudinally extends and is supported in midair above the same surface; and a movable conductor that is supported in midair above the same surface and connected to the movable portion. The movable portion has a movable electrode that faces the fixed electrode in a noncontact manner and is connected to the fixed portion to be able to move to the fixed portion in the facing direction of the electrode. Using electrostatic attraction generated between the electrodes by a voltage applied between the ground and the movable electrode, the movable portion is made to approach the ground by a function of an elasticity means, and a high-frequency signal is switched by making the movable conductor contact with the stationary conductor. The fixed portion and the elasticity means are disposed longitudinally in an area inside the movable electrode.
TOSHIYOSHI HIROSHI
UNIV TOKYO
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda