Title:
High potential slope type single gap acceleration pipe
Document Type and Number:
Japanese Patent JP5971631
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a small-sized and high-energy high potential gradient type single-gap acceleration tube in which an extremely high reduction rate that cannot be obtained in a conventional acceleration tube can be obtained, discharge is prevented from being generated even when a high voltage is applied and an aberration coefficient that causes aberration is relatively small and which simultaneously performs acceleration and convergence, an application thereof and a gas nanobeam forming device employing the acceleration tube.SOLUTION: An anode electrode of an acceleration tube is an electrode, the cross section of which is L-shaped, formed from a vertical piece parallel with an axis of ion beams and a horizontal piece vertical to the axis, a distal end of the vertical piece extends toward a cathode electrode, and a distal end of the horizontal piece is fixed to an insulator. A plurality of intermediate electrodes include cross sections which are L-shaped similarly to the anode electrode, and are disposed while opposing the cathode electrode in such a manner that distal ends of vertical pieces form electric fields between the intermediate electrodes and the cathode electrode, and distal ends of horizontal pieces are fixed to the insulator.
Inventors:
Yasuyuki Ishii
Takeshi Okubo
Kamiya wealth
Yoshinobu Miyake
Takeshi Okubo
Kamiya wealth
Yoshinobu Miyake
Application Number:
JP2012197645A
Publication Date:
August 17, 2016
Filing Date:
September 07, 2012
Export Citation:
Assignee:
Japan Atomic Energy Agency
International Classes:
H01J37/12; H01J37/317; H05H5/00
Domestic Patent References:
| JP62001400U | ||||
| JP61200699A | ||||
| JP5234698A | ||||
| JP3917995Y2 |
Attorney, Agent or Firm:
Yukihiko Takada