Title:
高分解能ガスゲージ近接センサ
Document Type and Number:
Japanese Patent JP4226570
Kind Code:
B2
Abstract:
In a gas gauge, effects due to changes in the local environment are reduced by causing a measurement nozzle and a reference nozzle to react as if they were co-located, or located at approximately the same position. This is achieved by venting the reference nozzle in very close proximity to the measurement nozzle. A reference chamber surrounding the reference plate and reference nozzle is vented at approximately the same location as the measurement nozzle. In an embodiment for use in a vacuum environment, the measurement nozzle is surrounded with an annular ring. The measurement annular ring is connected to an annular ring around the reference nozzle, which acts to co-locate the reference nozzle and the measurement nozzle. To avoid choked flow, another annular ring or rings may be placed around the measurement annular ring.
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Inventors:
Frederick Michael Carter
Peter Kotcher Spager
Peter Kotcher Spager
Application Number:
JP2005133569A
Publication Date:
February 18, 2009
Filing Date:
April 28, 2005
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
G01B13/12; G01L7/00; G01L19/02; G01L19/04
Domestic Patent References:
| JP56087805A | ||||
| JP2232507A | ||||
| JP50055465U |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki