Title:
高分解能ガスゲージ近接センサ
Document Type and Number:
Japanese Patent JP4226602
Kind Code:
B2
Abstract:
A system and method for precisely detecting very small distances between a measurement probe having an elongated nozzle with a relatively long and thin orifice. The proximity sensor uses a constant gas flow and senses a mass flow rate within a pneumatic bridge to detect very small distances. The system and method use a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller that in various combinations allow for detection of very small distances in the nanometer to sub-nanometer range.
Inventors:
Joseph H Lions
Application Number:
JP2005518236A
Publication Date:
February 18, 2009
Filing Date:
August 25, 2004
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
G01B13/12; G01B13/00; G01B13/16
Domestic Patent References:
| JP63009805A | ||||
| JP48033843A | ||||
| JP1213510A | ||||
| JP2232507A | ||||
| JP53058260A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki
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