Title:
ロールツーロールシステムにおける高速微細基板整列装置
Document Type and Number:
Japanese Patent JP5465489
Kind Code:
B2
Abstract:
Disclosed is a substrate alignment apparatus capable of performing coarse and fine alignments of a substrate in a progressing route to remove or reduce an alignment error between the substrate and a pattern roll. The coarse alignment may be performed by moving a frame using a stage when the alignment error is relatively large, and the fine alignment may be performed by moving subsidiary rollers of a roller unit relative to a main roller of a roller unit when the alignment error is relatively small. An example substrate alignment apparatus may include a frame and a roller unit rotatably fixed to the frame to support a substrate, wherein the roller unit includes a main roller, and at least one subsidiary roller fixed to the main roller such that the at least one subsidiary roller can move relative to the main roller to align the substrate.
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Inventors:
Kim Dong people
Shinobu
Zhao Akira
Masa Xu
Cheap base
Kim Kim
Shinobu
Zhao Akira
Masa Xu
Cheap base
Kim Kim
Application Number:
JP2009191851A
Publication Date:
April 09, 2014
Filing Date:
August 21, 2009
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
B65H23/038; B41F16/00; B41F33/06; B65H23/188
Domestic Patent References:
| JP55007110A | ||||
| JP2004345781A | ||||
| JP10310298A |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito