Title:
高流速・高エネルギー光子供給源
Document Type and Number:
Japanese Patent JP2004531861
Kind Code:
A
Abstract:
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
Inventors:
Taylor, Alan
Crug, David
Barnet, Christopher
Mercer, Ian
Crug, David
Barnet, Christopher
Mercer, Ian
Application Number:
JP2002588731A
Publication Date:
October 14, 2004
Filing Date:
May 03, 2002
Export Citation:
Assignee:
Power Rays Limited
International Classes:
G21K1/00; G03F7/20; G21K5/08; H05G2/00; H05H1/24; (IPC1-7): H05G2/00; G21K1/00; G21K5/08; H05H1/24
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto