Title:
Hita Silicofluoride processing unit
Document Type and Number:
Japanese Patent JP5994754
Kind Code:
B2
More Like This:
Inventors:
Shinji Fujito
Yasunari Koga
Kenichi Tominaga
Takashi Doi
Hiraya Tatsuhiko
Takeru Imamura
Yasunari Koga
Kenichi Tominaga
Takashi Doi
Hiraya Tatsuhiko
Takeru Imamura
Application Number:
JP2013172782A
Publication Date:
September 21, 2016
Filing Date:
August 23, 2013
Export Citation:
Assignee:
jfe Steel Corporation
International Classes:
C23C10/08
Domestic Patent References:
JP7173604A | ||||
JP8189781A | ||||
JP60207892A | ||||
JP10147856A | ||||
JP8169750A | ||||
JP11256289A | ||||
JP2013112600A | ||||
JP2000283655A |
Foreign References:
US20020134466 |
Attorney, Agent or Firm:
Shigeru Inoue
Kazuhiro Mori
Kazuhiro Mori
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