Title:
HOLLOW CATHODE AND ION SOURCE
Document Type and Number:
Japanese Patent JP2022104062
Kind Code:
A
Abstract:
To provide a hollow cathode and an ion source that do not use a plasma generation gas, e.g. Ar, and can use a plasma raw material gas as a plasma generation gas.SOLUTION: In hollow cathodes attached to a plasma generating container 101 included in an ion source 100 of an ion beam irradiation device provided, and the ion source provided with the hollow cathodes 10A, 10B, the hollow cathodes 10A, 10B include an electron emission member which releases electrons by being heated, and in which an internal flow path 11a is formed. There is provided a structure in which a raw material gas is introduced into the internal flow path 11a, the raw material gas G passing through the internal flow path 11a and electrons generated in the internal flow path 11a are supplied to the plasma generating container 101, and the electron emission member 11 is made of a single metal.SELECTED DRAWING: Figure 1
Inventors:
NAGAO YUICHI
UI TOSHIMASA
YASUDA KEISUKE
UI TOSHIMASA
YASUDA KEISUKE
Application Number:
JP2020219049A
Publication Date:
July 08, 2022
Filing Date:
December 28, 2020
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD
International Classes:
H01J27/14; H01J1/16; H01J37/08; H05H1/24
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