Title:
HOLLOW STRUCTURE FOR FABRY-PEROT RESONATOR
Document Type and Number:
Japanese Patent JP2002006238
Kind Code:
A
Abstract:
To provide a hollow structure for a Fabry-Perot resonator which is capable of preventing the generation of frequency noise.
This hollow structure for the Fabry-Perot resonator has a stationary mirror 214 which is mounted at a substrate 203 having a first conductive surface, a membrane 216 which has a movable mirror 213 and is suspended on the substrate 203 having a second conductive surface, a drive circuit which imparts electrical potential between the first conductive surface and the second conductive surface and a measuring circuit which measures the distance between the stationary mirror 214 and the movable mirror 213 and adjusts the potential in correspondence to this measurement.
Inventors:
TUCKER RODNEY S
SORIN WAYNE V
BANEY DOUGLAS M
SORIN WAYNE V
BANEY DOUGLAS M
Application Number:
JP2001115758A
Publication Date:
January 09, 2002
Filing Date:
April 13, 2001
Export Citation:
Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
G01J3/26; G02B5/28; G02B7/182; G02B26/00; G02B26/02; H01S5/04; H01S5/0687; H01S5/14; H01S5/183; H01S5/343; H01S3/105; H01S5/068; (IPC1-7): G02B26/00; G01J3/26; G02B5/28; G02B7/182; H01S5/04; H01S5/0687; H01S5/14; H01S5/343
Attorney, Agent or Firm:
Kimohisa Kato