Title:
HONING DEVICE
Document Type and Number:
Japanese Patent JPH0513483
Kind Code:
A
Abstract:
PURPOSE: To remove resin flashes attached to leads without causing damage to the surface of a semiconductor product.
CONSTITUTION: A honing device is equipped with a semiconductor product feed unit 8, a honing material supply unit l which supplies honing material and water, and a gun drive XY table 3 which move guns 2 and 2' that spray honing material and water with air, and the guns are moved to a part where the resin flashes of a semiconductor product 4 are removed and remove the resin flashes spraying honing material on the part concerned.
Inventors:
SAKAMOTO HIDEO
Application Number:
JP18351091A
Publication Date:
January 22, 1993
Filing Date:
June 28, 1991
Export Citation:
Assignee:
NEC CORP
International Classes:
B24C3/32; B24C9/00; H01L21/56; (IPC1-7): B24C3/32; B24C9/00; H01L21/56
Domestic Patent References:
| JPS58171261A | 1983-10-07 |
Attorney, Agent or Firm:
Sugano Naka
Next Patent: JPS513484