Title:
HORIZONTAL LIGHT-RECEIVING ELEMENT
Document Type and Number:
Japanese Patent JPH01220868
Kind Code:
A
Abstract:
PURPOSE:To make it possible to improve the responsiveness of the output signal (an electric signal) for an incident light by a method wherein at least either of impurity regions is formed on the region including the overhung wall surface formed in the vicinity of the region formed by leaving the prescribed interval. CONSTITUTION:A groove part 10, having both wall faces turned to overhung surfaces, is formed in the vicinity of the light-receiving region A of a transverse type light-receiving element, and an N-type impurity region 3 is formed on the region containing said groove part 10. As a result, the N-type impurity region 3 becomes as deep as the P-type impurity region 4 in the vicinity of the light-receiving region A, and accordingly, the large difference of the field strength in depthwise direction is removed. Moreover, as the wall surface of the groove part 10 has an overhanging form, the N-type impurity region 3 and the P-type impurity region 4 come closer as the groove becomes deeper. Accordingly, the electric line of force appearing between the N-type impurity region 3 and the P-type impurity region 4 appears in the form of a straight line.
Inventors:
MATSUOKA TORU
MORITA TETSUO
MORITA TETSUO
Application Number:
JP4690588A
Publication Date:
September 04, 1989
Filing Date:
February 29, 1988
Export Citation:
Assignee:
HIKARI GIJUTSU KENKYU KAIHATSU
International Classes:
H01L31/10; (IPC1-7): H01L31/10
Domestic Patent References:
| JPS62277774A | 1987-12-02 | |||
| JPS5477088A | 1979-06-20 |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)