Title:
HORIZONTAL TYPE FIELD EMISSION ELECTRON GUN AND ELECTROMAGNETIC WAVE GENERATOR
Document Type and Number:
Japanese Patent JP2022189581
Kind Code:
A
Abstract:
To provide a horizontal type field emission electron gun that has a simple structure, can be downsized, and can make electrons travel in a direction in parallel with a substrate.SOLUTION: A horizontal type field emission electron gun 1 comprises: an emitter electrode 12; and gate electrodes 13 for causing electrons to be emitted from the emitter electrode into vacuum. The emitter electrode and the gate electrodes are made of metal films formed on a substrate 10 whose surface has an insulation property. The emitter electrode has a tip part 12T whose tip is acute in plan view. The gate electrodes are disposed so as to sandwich the tip part of the emitter electrode in plan view. By applying voltage to the gate electrodes, electrons emitted from the tip part of the emitter electrode travel in a direction in parallel with a surface of the substrate. On the surface of the substrate is formed a groove 16 along the travel direction of electrons.SELECTED DRAWING: Figure 1
Inventors:
YANG BO
HSU HENGMING
SHINOHARA MASATAKE
HSU HENGMING
SHINOHARA MASATAKE
Application Number:
JP2021098239A
Publication Date:
December 22, 2022
Filing Date:
June 11, 2021
Export Citation:
Assignee:
UNIV KYOTO
International Classes:
H01J1/316; H01J23/18; H01J37/06; H01J37/073
Attorney, Agent or Firm:
Patent Attorney Corporation Maeda Patent Office