Title:
HOT AIR CIRCULATION FURNACE
Document Type and Number:
Japanese Patent JP3344106
Kind Code:
B2
Abstract:
PURPOSE: To provide a hot air circulation furnace in which productivity can be improved and a high purity control over atmospheric gas can be realized under a simple configuration not using any equipment and the like.
CONSTITUTION: There are provided a heat treatment chamber 3 having item to be processed stored therein ; a gas circulation passage 4 arranged at an outer circumference of the heat treatment chamber 3, connected to the heat treatment chamber 3 and for causing atmospheric gas G flowed even in the heat treatment chamber 3; a gas supplying pipe 6 inserted into the gas circulation passage 4, arranged along a circulating direction of the atmospheric gas G and to which external atmospheric gas is supplied. To the extremity end of the gas supplying pipe 6 is fixed a gas injection nozzle 7 for use in injecting the atmospheric gas G.
Inventors:
Isao Tanino
Application Number:
JP22931994A
Publication Date:
November 11, 2002
Filing Date:
September 26, 1994
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F27B17/00; F27B5/10; F27B5/16; F27D7/02; F27D7/04; (IPC1-7): F27B5/10; F27B5/16; F27B17/00; F27D7/02
Domestic Patent References:
| JP7313861A | ||||
| JP610799U | ||||
| JP4940044B1 | ||||
| JP5226722B2 |
Attorney, Agent or Firm:
Kazuhide Okada