Title:
HOT PLATE DEVICE
Document Type and Number:
Japanese Patent JP2001183063
Kind Code:
A
Abstract:
To provide a hot plate device heating surface of which is made to have highly uniform temperature distribution and the heating element of which can be manufactured easily and can be replaced easily with another element, resulting in a reduced maintenance cost.
The hot plate device is provided with a heat conductive heating member 5 having a heating surface 5b for heating an object to be heated and at least one heated-fluid passage 9 and 10 for heating the heating member 5 and swings a heating fluid in the passages 9 and 10 by making the fluid to go in and out of the passages 9 and 10 from openings provided at both ends of the passage 9.
Inventors:
INOUE TATSUO
MINAMOTO NAOKI
NAKAGAWA TETSUTARO
MINAMOTO NAOKI
NAKAGAWA TETSUTARO
Application Number:
JP36575699A
Publication Date:
July 06, 2001
Filing Date:
December 24, 1999
Export Citation:
Assignee:
AISIN SEIKI
International Classes:
H01L21/31; F26B23/10; (IPC1-7): F26B23/10