Title:
金属カルコゲナイドピラーを形成する方法
Document Type and Number:
Japanese Patent JP7064009
Kind Code:
B2
Abstract:
Methods of producing a self-aligned structure comprising a metal chalcogenide are described. Some methods comprise forming a metal-containing film in a substrate feature and exposing the metal-containing film to a chalogen precursor to form a self-aligned structure comprising a metal chalcogenide. Some methods comprise forming a metal-containing film in a substrate feature, expanding the metal-containing film to form a pillar and exposing the pillar to a chalogen precursor to form a self-aligned structure comprising a metal chalcogenide. Some methods comprise directly forming a metal chalcogenide pillar in a substrate feature to form a self-aligned structure comprising a metal chalcogenide. Methods of forming self-aligned vias are also described.
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Inventors:
Murrick, Amrita Bee.
Gandicotta, Shrine Nivers
Gandicotta, Shrine Nivers
Application Number:
JP2020546087A
Publication Date:
May 09, 2022
Filing Date:
March 06, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/768; C23C16/06
Domestic Patent References:
| JP2011109099A | ||||
| JP2019521518A | ||||
| JP2018515692A |
Foreign References:
| US20130260527 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation