Title:
システムを作動させる方法、システムを作動させる制御信号を変更する装置、およびそのような装置を調整する方法
Document Type and Number:
Japanese Patent JP5481205
Kind Code:
B2
Abstract:
A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.
Inventors:
Hans Ulrich Danzebrink
Day High Kazuhiko
Ileus Hartmut
Akinori Saito
Day High Kazuhiko
Ileus Hartmut
Akinori Saito
Application Number:
JP2010002493A
Publication Date:
April 23, 2014
Filing Date:
January 08, 2010
Export Citation:
Assignee:
Mitutoyo Corporation
Bundesli Pabrik Deutschland, Entfair Tretten-Delchden Presidentten Der Fizzi Karlish Tehnish Bundes Anstalt
Bundesli Pabrik Deutschland, Entfair Tretten-Delchden Presidentten Der Fizzi Karlish Tehnish Bundes Anstalt
International Classes:
G01Q10/06; G02B21/00
Domestic Patent References:
| JP2007017706A | ||||
| JP4038504A | ||||
| JP11271343A | ||||
| JP6033982A | ||||
| JP2006132969A |
Foreign References:
| WO2008029561A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito