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Title:
How to detect the leak of the thing of a non-rigid body to be examined
Document Type and Number:
Japanese Patent JP6129870
Kind Code:
B2
Abstract:
The invention relates to a simplified method for detecting leaks on a non-rigid test specimen, comprising the steps of: introducing the test specimen into a film chamber, lowering the pressure in the film chamber outside of said test specimen, and detecting a leak in the test specimen on the basis of a spatial change in the film of said film chamber.

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Inventors:
Daniel Wetzich
Gilvio Decker
Application Number:
JP2014549497A
Publication Date:
May 24, 2017
Filing Date:
December 28, 2012
Export Citation:
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Assignee:
Inficon GmbH
International Classes:
G01M3/26; G01M3/38; G01M3/40
Domestic Patent References:
JP2001508536A
JP2003505690A
Foreign References:
EP0741288A1
Attorney, Agent or Firm:
Mitsuo Tanaka
Hiroshi Yamazaki
Yoshiyuki Maebori