Title:
測定台上のマスクホルダの位置を検出する方法
Document Type and Number:
Japanese Patent JP6754447
Kind Code:
B2
Abstract:
The invention relates to a method for detecting the position of a mask holder (1) for masks (2) for photolithography, comprising the following steps: Positioning the mask holder (1) with masks (2) on a measuring table of a measuring device; measuring the mask holder (1) by means of an algorithm; recording the absolute position of the mask holder (1) on the measuring table and capturing and recording at least one reference image.
Inventors:
Solo One Hans-Michael
Application Number:
JP2018555472A
Publication Date:
September 09, 2020
Filing Date:
April 20, 2017
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G01B11/00; G03F7/20; G03F9/00
Domestic Patent References:
| JP11317367A | ||||
| JP64009303A |
Foreign References:
| US20110225554 | ||||
| US5798947 | ||||
| DE102006059440A1 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Disciple Maru Ken
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Naoki Kondo
Takeo Nasu
Disciple Maru Ken
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Naoki Kondo
Takeo Nasu