How to evaluate the surface and interface semi- grade of a semiconductor

Title:

How to evaluate the surface and interface semi- grade of a semiconductor

Document Type and Number:

Japanese Patent JP6066337

Kind Code:

B2

Inventors:

Tomita Eiki
Hiroyuki Sakaki
Miwa Houki

Application Number:

JP2014061734A

Publication Date:

January 25, 2017

Filing Date:

March 25, 2014

Export Citation:

Assignee:

TOYOTA JIDOSHA KABUSHIKI KAISHA
School corporation Toyota Gakuen

International Classes:

H01L21/66

Domestic Patent References:

Attorney, Agent or Firm:

Kaiyu International Patent Office

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