Title:
マウントフランジの端面修正方法
Document Type and Number:
Japanese Patent JP5340835
Kind Code:
B2
Inventors:
Shinya Yasuda
Satoshi Takahashi
Hiroko Hashimoto
Naomi Ishida
Satoshi Takahashi
Hiroko Hashimoto
Naomi Ishida
Application Number:
JP2009161468A
Publication Date:
November 13, 2013
Filing Date:
July 08, 2009
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/16; H01L21/301
Domestic Patent References:
| JP8339977A | ||||
| JP8066859A | ||||
| JP5318311A |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito