Title:
移動レンズを有するリソグラフ及び記憶媒体にデジタルホログラムを生成する方法
Document Type and Number:
Japanese Patent JP2004531844
Kind Code:
A
Abstract:
The invention relates to a lithograph for producing digital holograms in a storage medium ( 4 ), having a light source ( 6, 10 ) for producing a write beam ( 12 ) with a predefined beam cross section, having a writing lens ( 14 ) for focusing the write beam ( 12 ) onto the storage medium ( 4 ) to be written, the writing lens ( 14 ) being arranged in a lens holder ( 16 ), and having drive means for the two-dimensional movement of the write beam relative to the storage medium. The technical problem of writing computer-generated holograms as quickly as possible and with little effort by means of optical lithography is solved in that a first drive device ( 18 ) is provided for moving the lens holder ( 16 ) substantially at right angles to the write beam ( 12 ) and in that the aperture of the writing lens ( 14 ) is smaller than the beam cross section of the write beam ( 12 ). The inventon also relates to a method for the lithographic production of a hologram in a storage medium.
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Inventors:
Nethé, Stephen
Dietrich, Christoph
Robert, Thoman
Stadler, Stephan
Rivers, jerun
Dietrich, Christoph
Robert, Thoman
Stadler, Stephan
Rivers, jerun
Application Number:
JP2002577652A
Publication Date:
October 14, 2004
Filing Date:
March 28, 2002
Export Citation:
Assignee:
Theza Scrivos Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
G02B5/32; G03F7/20; G03H1/08; G11B7/0065; G11B7/09; G11B7/125; G11B7/135; H01L21/027; (IPC1-7): G11B7/135; G02B5/32; G03F7/20; G03H1/08; G11B7/0065; G11B7/09; G11B7/125; H01L21/027
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Shimichi Akihisa
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Shimichi Akihisa
Masaya Nishiyama