Title:
シリコン単結晶の育成方法
Document Type and Number:
Japanese Patent JP5724226
Kind Code:
B2
Inventors:
Nobumasa Naito
Application Number:
JP2010139812A
Publication Date:
May 27, 2015
Filing Date:
June 18, 2010
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/20
Domestic Patent References:
| JP2010059032A | ||||
| JP2005314143A | ||||
| JP9227278A | ||||
| JP2004269273A | ||||
| JP2001072492A | ||||
| JP10095689A | ||||
| JP44021014B1 | ||||
| JP58074596A | ||||
| JP9227279A | ||||
| JP2009292663A | ||||
| JP2008120623A |
Attorney, Agent or Firm:
Ascend Patent Business Corporation
Michio Mori
Hideyuki Matsunaga
Michio Mori
Hideyuki Matsunaga