Title:
切削ブレードの装着方法
Document Type and Number:
Japanese Patent JP6934334
Kind Code:
B2
Abstract:
A cutting blade mounting method of sandwiching both side surfaces of an annular cutting blade by a first flange and a second flange, the first flange being mounted on an end of a spindle and having a suction hole sucking and holding a side surface of the cutting blade to a sandwiching surface of the first flange, includes: a cutting blade provisional holding step of sucking and holding the cutting blade to the first flange by making the cutting blade abut against the sandwiching surface of the first flange at a perfect circle position at which a center of the cutting blade coincides with an axis of the spindle, and making a suction force act on the suction hole; and a fixing step of fixing the cutting blade maintaining the perfect circle position in the cutting blade provisional holding step to the first flange by the second flange.
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Inventors:
Kazuma Sekiya
Application Number:
JP2017128148A
Publication Date:
September 15, 2021
Filing Date:
June 30, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; H01L21/301
Domestic Patent References:
| JP2001150270A | ||||
| JP2016132046A | ||||
| JP2002154054A | ||||
| JP2010284774A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki