Title:
圧電性材料を製造する方法
Document Type and Number:
Japanese Patent JP5896586
Kind Code:
B2
Abstract:
The invention concerns a method for preparing a material based on piezoelectric ceramic oxide(s) comprising the following steps: a) wet deposition on at least one surface of a substrate of a layer of a dispersion comprising a piezoelectric ceramic oxide powder and a piezoelectric ceramic oxide precursor sol-gel solution identical to or different from the piezoelectric oxide constituting the powder; b) repeating a) once or several times, so as to obtain a stack of at least two layers; c) heat-treating said layers so as to transform them into corresponding ceramics; d) wet-shrink impregnation of the stack obtained at c) with a sol-gel solution identical to the one used in step a); e) optionally repeating step d) once or several times; f) heat-treating said stack, so as to transform the sol-gel impregnating the stack into the corresponding piezoelectric ceramics.
Inventors:
Boy Philip
Elhart Jill
Belleville Philip
Elhart Jill
Belleville Philip
Application Number:
JP2007516015A
Publication Date:
March 30, 2016
Filing Date:
June 16, 2005
Export Citation:
Assignee:
INSERM(INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICALE)
International Classes:
H01L41/318; B32B7/02; B32B9/00; B32B15/04; B32B18/00; C23C20/06; H01L41/187; H01L41/39; H01L41/43
Domestic Patent References:
| JP2000299512A | ||||
| JP2003257269A | ||||
| JP11307833A | ||||
| JP2001298222A | ||||
| JP4293280A | ||||
| JP6032613A |
Other References:
F.F.C. Duval et al., Lead germanium oxide sinter-assisted PZT composite thick films,Journal of the Europian Ceramic Society,EU,2003年10月,Vol.23,No.11,P.1935-1941
R.A. Dorey et al., Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric and piezoelectric properties of a PZT composite thick film, Journal of the European Ceramic Society,EU,2002年12月,Vol.22,No.16,P.2921-2926
R.A. Dorey et al., Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric and piezoelectric properties of a PZT composite thick film, Journal of the European Ceramic Society,EU,2002年12月,Vol.22,No.16,P.2921-2926
Attorney, Agent or Firm:
Tamio Nishiwaki
Nishiwaki Reishi
Nishiwaki Reishi