Title:
電解銅めっき液および電解銅めっき液の管理方法
Document Type and Number:
Japanese Patent JP4481541
Kind Code:
B2
Inventors:
Kiyota Yu
Hideki Tsuchida
Shinjiro Hayashi
Hideki Tsuchida
Shinjiro Hayashi
Application Number:
JP2001381605A
Publication Date:
June 16, 2010
Filing Date:
December 14, 2001
Export Citation:
Assignee:
Japan Rironal Co., Ltd.
International Classes:
C25D3/38; C25D7/00; C25D7/12; H01L23/12; H05K3/18; H05K3/42
Domestic Patent References:
| JP5230687A | ||||
| JP2002275684A | ||||
| JP4358091A | ||||
| JP7062587A | ||||
| JP8271497A |
Foreign References:
| WO1999031300A1 | ||||
| WO1998026114A1 | ||||
| WO1999003783A1 |
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office
Hisashi Tsuji
Koji Hashimoto
Hisashi Tsuji
Koji Hashimoto