Title:
荷電粒子ビーム発生装置の運転方法および荷電粒子ビーム発生装置
Document Type and Number:
Japanese Patent JP6457251
Kind Code:
B2
Inventors:
Kazunori Tsufuhisa
Kato Goshi
Nao Iga
Kato Goshi
Nao Iga
Application Number:
JP2014236705A
Publication Date:
January 23, 2019
Filing Date:
November 21, 2014
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H05H13/04; A61N5/10; H01J27/02; H05H7/08; H05H9/00
Domestic Patent References:
| JP2007042659A | ||||
| JP10247600A | ||||
| JP2004198236A | ||||
| JP2012174515A | ||||
| JP6168799A | ||||
| JP8276024A |
Attorney, Agent or Firm:
Kaichi International Patent Office