Title:
電子衝撃検出器を動作させる方法
Document Type and Number:
Japanese Patent JP6826218
Kind Code:
B2
Abstract:
An electron-bombarded detector for detecting low light signals includes a vacuum tube structure defining a cylindrical vacuum tube chamber, a photocathode disposed at a first end of the vacuum tube chamber, a sensor disposed at a second end of the vacuum tube chamber, ring electrodes disposed in the vacuum tube chamber for generating an electric field that accelerates emitted photoelectrons toward the sensor, and a magnetic field generator configured to generate a symmetric magnetic field that applies a focusing lens effect on the photoelectrons. The ring electrodes and magnetic field generator are operating using one of a reduced distance focusing approach and an acceleration/deceleration approach such that the photoelectrons have a landing energy below 2 keV. The use of reflective mode photocathodes is enabled using either multi-pole deflector coils, or ring electrodes formed by segmented circular electrode structures. Large angle deflections are achieved using magnetic or electrostatic deflectors.
Inventors:
The Anne Seaman
Vierlac Stephen
Fielden John
Vierlac Stephen
Fielden John
Application Number:
JP2020018027A
Publication Date:
February 03, 2021
Filing Date:
February 05, 2020
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J31/50; H01J29/52; H01J29/74; H01J29/76
Domestic Patent References:
| JP2015507321A | ||||
| JP2016502729A |
Foreign References:
| WO2013090261A1 | ||||
| US20140063502 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office